Semiconductor Equipment Division

• Semiconductor Equipment Division
• Application
  • LED
  • MEMS
  • TSV
  • Power Divice
  • Saw Device
  • GaN PA
• Products
  • DRIE Etcher
  • ICP Etcher
  • Saw Filter Etcher
  • Nano Imprinter
• About Us
• Contact
• Other Business
  • GigaLane Co., Ltd.
  • RF Component
  • Test Solution
  • Automated Equipment
  • IoT_Beacon

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Power Device

▶ Deep Silicon Etch

• NeoS-MAXIS 200
• NeoGEN-MAXIS 200
• NeoGENⅡ-MAXIS 200

▶ Sic Etch

• NeoS-MAXIS 200
• NeoGEN-MAXIS 200
• NeoGENⅡ-MAXIS 200

▶ Nano Patterning

• CITUS