Semiconductor Equipment Division

Nano Imprinter is patterning equipment that uses mold to imprint specific pattern needed on substrate. Our Nano Imprinter utilize film-mold which is twined around roll(Roll-to-Roll type) to capture high yield and productivity and cope with warpage or bow of substrate.

• • Increasing needs for nanometer pattern in LED, display, semiconductor, photovoltaic industry
• • Emerging issue of productivity due to adoption of large-scale substrate

• • Applicable for fine pattern
• • Resin mold are being supplied
• • Cost competitiveness captured by using resin mold repatedly
• • Resin coater is in-line with imprinter

• • LED PSS (Patterened Sapphire Substrate)
• • Display
• • Print
• • Semiconductor
• • Bio & etc.