Semiconductor Equipment Division

• Semiconductor Equipment Division
• Application
  • LED
  • MEMS
  • TSV
  • Power Divice
  • Saw Device
  • GaN PA
• Products
  • DRIE Etcher
  • ICP Etcher
  • Saw Filter Etcher
  • Nano Imprinter
• About Us
• Contact
• Other Business
  • GigaLane Co., Ltd.
  • RF Component
  • Test Solution
  • Automated Equipment
  • IoT_Beacon

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LED

▶ PSS/GaN/Oxide Etch

- semi-auto​

- Auto

- Auto, Cluster

• MAXIS300LCH
• MAXIS300LAH
• NeoSYS-MAXIS300L

▶ Nano Patterning

• CITUS